Ball-and-stick model of the methyltrichlorosilane molecule, H₃CSiCl₃.

Colour code:

• Carbon, C: grey-black
• Hydrogen, H: white
• Silicon, Si: grey
• Chlorine, Cl: green

Crystal structures of similar RSiCl₃ species from crystallographic databases show similar structures, for example Main Group Chem. (1998) 2, 275–283 and J. Chem. Soc., Chem. Commun. (1982) 1099–1100.

Structure calculated with Spartan Student 4.1, using the MP2 level of theory and the 6-311+G** basis set.